Sintering press and pressure sintering method for producing a sintered connection by means of the sintering press

ABSTRACT

A sintering press for producing a sintered connection between a first connection partner and a second connection partner disposed thereabove, having a suction-fixing installation for fixing the first connection partner, having a compression piece which is disposed above the suction-fixing installation. The sintering press for producing the sintered connection is configured for converging the compression piece and the suction-fixing installation relative to one another and for mutually compressing the first connection partner and the second connection partner, wherein the suction-fixing installation on the side thereof that faces the compression piece has first suction openings, wherein the suction-fixing installation, when the first connection partner is disposed above the first suction openings, by generating a negative pressure at the first suction openings, is configured for suctioning the first connection partner and, on account thereof, for fixing the latter in relation to the suction-fixing installation. The invention furthermore relates to a pressure sintering method for producing a sintered connection by the sintering press.

CROSS REFERENCE TO RELATED APPLICATIONS

This application relates to and claims priority to DE 10 2019 128 667.0filed Oct. 23, 2020, the entire contents of which are incorporatedherein by reference.

BACKGROUND OF THE INVENTION Field of the Invention

The invention relates to a sintering press and to a pressure sinteringmethod for producing a sintered connection by means of the sinteringpress.

Description of the Related Art

A pressure sintering method in which a first connection partner, forexample a substrate, by way of a sintered connection is connected to asecond connection partner, for example a power semiconductor component,is known from DE 10 2015 120 156 A1. The first connection partner onwhich the second connection partner is disposed herein is placed on alower tool of a sintering press, wherein a sintering material to besintered is disposed between the two connection partners. A plastic filmportion of a plastic film is preferably disposed on the connectionpartners. An impingement of the connection partners with a pressure inthe direction of the lower tool by means of a compression piece and anelastic pressure pad of a sintering press as well as an impingement ofthe sintering material with a temperature subsequently takes place,wherein the sintering material herein is converted to a sintered metal,the sintered connection between the connection partners being configuredon account thereof. After the sintered connection has been configured,the compression piece and the elastic pressure pad are lifted away fromthe connection partners again.

It is disadvantageous herein that the connection partners can adhere tothe pressure pad, or in the case of a plastic film portion of a plasticfilm being disposed between the pressure pad and the connection partnersduring the impingement of pressure, that the connection partners canadhere to the plastic film and thus may be altered in terms of theposition and/or orientation of said connection partners in the sinteringpress and the connection partners may in particular be lifted conjointlywith the pressure pad or the plastic film, respectively, when theelastic pressure pad, or the plastic film, respectively, is lifted.

ASPECTS AND SUMMARY OF THE INVENTION

*It is an object of the invention to achieve a sintering press forproducing a sintered connection between a first connection partner and asecond connection partner disposed thereabove, wherein the firstsintering partner can be reliably fixed in the sintering press.

This object is achieved by a sintering press for producing a sinteredconnection between a first connection partner and a second connectionpartner disposed thereabove, having a suction-fixing installation forfixing the first connection partner, having a compression piece which isdisposed above the suction-fixing installation, wherein the sinteringpress for producing the sintered connection, when the first connectionpartner and the second connection partner are disposed between thecompression piece and the suction-fixing installation, is configured forconverging the compression piece and the suction-fixing installationrelative to one another and, on account thereof, for mutuallycompressing the first connection partner and the second connectionpartner, wherein the suction-fixing installation on the side thereofthat faces the compression piece has first suction openings, wherein thesuction-fixing installation, when the first connection partner isdisposed above the first suction openings, by means of generating anegative pressure at the first suction openings, is configured forsuctioning the first connection partner and, on account thereof, forfixing the latter in relation to the suction-fixing installation.

This object is furthermore achieved by a pressure sintering method forproducing a sintered connection between a first connection partner and asecond connection partner disposed thereabove by means of a sinteringpress according to the invention, comprising the following method stepsin succession:

-   -   a) disposing between the compression piece and the        suction-fixing installation the first connection partner        conjointly with the second connection partner disposed above the        first connection partner, wherein a sintering material to be        sintered is disposed between the first connection partner and        the second connection partner, wherein the first connection        partner is disposed above the first suction openings;    -   b) fixing the first connection partner in relation to the        suction-fixing installation by suctioning the first connection        partner by means of generating a negative pressure at the first        suction openings;    -   c) impinging the first connection partner and the second        connection partner and the sintering material with a pressure by        converging the compression piece and the suction-fixing        installation relative to one another, wherein, on account        thereof, the first connection partner and the second connection        partner are mutually compressed, and impinging the sintering        material with a temperature, wherein the sintering material on        account of the impingement with pressure and temperature is        converted to a sintered metal;    -   d) diverging the compression piece and the suction-fixing        installation relative to one another;    -   e) releasing the first connection partner in relation to the        suction-fixing installation by reinstating the gas pressure        prevailing above the first connection partner at the first        suction openings.

Advantageous configurations of the method are derived in a manneranalogous to advantageous configurations of the sintering press and viceversa.

It proves advantageous for the suction-fixing installation to bedisposed on a compression counterpart of the sintering press, or to bean integral component part of a compression counterpart of the sinteringpress. The sintering press is of a particularly simple construction whenthe suction-fixing installation is disposed on a compression counterpartof the sintering press. The sintering press is of a particularly compactconstruction when the suction-fixing installation is an integralcomponent part of a compression counterpart of the sintering press.

It furthermore proves advantageous for the respective cross-sectionalarea of the first suction openings to be 0.007 mm² to 3.2 mm², inparticular 0.03 mm² to 1.8 mm². The cross-sectional area of the firstsuction openings is thus preferably relatively small. Damage to thefirst connection partner, and in particular breaking of the firstconnection partner, is reliably avoided on account thereof when a highpressure acts on the first connection partner, such as on a substrate,for example, during the pressing procedure, despite said firstconnection partner not bearing across the full area, the latter beingcaused by the first suction openings.

It furthermore proves advantageous for the side of the suction-fixinginstallation that faces the compression piece to have an in particularrectangular fixing region, wherein the first suction openings aredisposed within the fixing region, wherein at least some of the firstsuction openings are disposed in a peripheral region of the fixingregion or are disposed in a central region of the fixing region. Fixingof the first connection partner in a highly load-bearing manner isenabled on account thereof.

In this context, it proves advantageous for the side of thesuction-fixing installation that faces the compression piece to have arectangular fixing region, wherein the number of first suction openingsin the corner regions of the fixing region is increased in comparison toother regions of the fixing region. Fixing of the first connectionpartner in a highly load-bearing manner is enabled on account thereof.

It furthermore proves advantageous for the sintering press to have asuction gripper which, by means of generating a negative pressure at thesuction openings thereof, is configured for firmly holding the firstconnection partner directly or indirectly on said suction gripper and,prior to the pressing procedure, for disposing the first connectionpartner conjointly with the second connection partner disposed above thefirst connection partner in the space between the compression piece andthe suction-fixing installation and/or, after the pressing procedure,for removing said first connection partner conjointly with said secondconnection partner from said space again. By means of a suction gripper,the first connection partner conjointly with the second connectionpartner disposed above the first connection partner prior to thepressing procedure can be very rapidly disposed in the space between thecompression piece and the suction-fixing installation and/or can be veryrapidly removed from said space again after the pressing procedure.

It furthermore proves advantageous for the sintering press for producingthe sintered connection, when the first connection partner and thesecond connection partner are disposed between the compression piece andthe suction-fixing installation and the first connection partner isdisposed directly on the suction-fixing installation, to be configuredfor converging the compression piece and the suction-fixing installationrelative to one another and, on account thereof, for mutuallycompressing the first connection partner and the second connectionpartner, wherein the suction-fixing installation on the side thereofthat faces the compression piece has first suction openings, wherein thesuction-fixing installation, when the first connection partner isdisposed above the first suction openings so as to be directly on thesuction-fixing installation, by means of generating a negative pressureat the first suction openings, is configured for suctioning the firstconnection partner and, on account thereof, for fixing the latter inrelation to the suction-fixing installation. A particularly economicalproduction of the sintered connection between the first connectionpartner and the second connection partner disposed thereabove is enabledon account thereof, wherein no workpiece carrier is required forproducing the sintered connection.

In this context, it proves advantageous for the suction-fixinginstallation on the side thereof that faces the compression piece tohave at least one second suction opening for suctioning a film portionof a film when the film portion is disposed above the first connectionpartner and the second connection partner and above the at least onesecond suction opening, wherein the at least one second suction openingis disposed in such a manner that the first connection partner, when thefirst connection partner is disposed above the first suction openings,is not disposed above the at least one second suction opening, whereinthe suction-fixing installation, when the film portion is disposed abovethe at least one second suction opening, by means of generating anegative pressure at the at least one second suction opening, isconfigured for suctioning the film portion and, on account thereof, forfixing the first connection partner in relation to the suction-fixinginstallation by way of the film portion. On account thereof, the firstconnection partner in relation to the suction-fixing installation isadditionally fixed indirectly by way of the film portion.

It furthermore proves advantageous for preferably elastic delimitationelements to be disposed on the side of the suction-fixing installationthat faces the compression piece, said delimitation elements, when thefirst connection partner is disposed directly on the suction-fixinginstallation, delimiting or preventing a movement of the firstconnection partner in a direction perpendicular to the normal directionof the side of the suction-fixing installation that faces thecompression piece. On account thereof, the first connection partner isadditionally fixed in relation to the suction-fixing installation,albeit only in the direction perpendicular to the normal direction ofthe side of the suction-fixing installation that faces the compressionpiece. The delimitation elements furthermore enable a particularlyprecise positioning of the first connection partner above the firstsuction openings.

It furthermore proves advantageous for the sintering press for producingthe sintered connection, when the first connection partner and thesecond connection partner are disposed between the compression piece andthe suction-fixing installation and the first connection partner isdisposed directly on a workpiece carrier having passage openings so asto be above the passage openings and the workpiece carrier is disposeddirectly on the suction-fixing installation, to be configured forconverging the compression piece and the suction-fixing installationrelative to one another and, on account thereof, for mutuallycompressing the first connection partner and the second connectionpartner, wherein the suction-fixing installation on the side thereofthat faces the compression piece has first suction openings, wherein thesuction-fixing installation, when the first connection partner isdisposed directly on a workpiece carrier having passage ducts so as tobe above the passage ducts and the workpiece carrier is disposeddirectly on the suction-fixing installation in such a manner that thepassage ducts are disposed so as to be in alignment with the firstsuction openings, by means of generating a negative pressure at thefirst suction openings, is configured for suctioning the firstconnection partner and, on account thereof, for fixing the latter inrelation to the suction-fixing installation. An economical production ofthe sintered connection between the first connection partner and thesecond connection partner disposed thereabove is enabled on accountthereof.

In this context, it proves advantageous for the suction-fixinginstallation on the side thereof that faces the compression piece tohave at least one second suction opening for fixing the workpiececarrier when the latter is disposed directly on the suction-fixinginstallation, wherein the suction-fixing installation, when theworkpiece carrier is disposed above the at least one second suctionopening, by means of generating a negative pressure at the at least onesecond suction opening, is configured for suctioning the workpiececarrier and, on account thereof, for fixing the latter in relation tothe suction-fixing installation. On account thereof, the workpiececarrier is very reliably fixed to the suction-fixing installation.

It furthermore proves advantageous for a frame element which encirclesthe first connection partner and is movable in relation to the workpiececarrier at least in the normal direction of the side of thesuction-fixing installation that faces the compression piece to bedisposed on the workpiece carrier, wherein the frame element on the sidethereof that faces the suction-fixing installation has ventilationtrenches which in the direction perpendicular to the normal direction ofthe side of the suction-fixing installation that faces the compressionpiece run through the frame element.

It furthermore proves advantageous between method steps a) and b) orbetween method steps b) and c) for a film portion of a film to bedisposed on the first connection partner and the second connectionpartner. The film portion prevents the first connection partner and/orthe second connection partner from adhering to the compression piece, orin the case of the sintering press according to the invention having apressure pad between the compression piece and the connection partner,the first connection partner and/or the second connection partner fromadhering to the pressure pad.

In this context, it proves advantageous between method steps d) and e)for the film portion to be removed from the first connection partner andthe second connection partner. On account of the first connectionpartner being fixed in relation to the suction-fixing installation whenremoving the film portion from the first connection partner and thesecond connection partner, the first connection partner and the secondconnection partner reliably remain at the position thereof within thesintering press according to the invention when the film portion isremoved from the first connection partner and the second connectionpartner, said first connection partner and said second connectionpartner not being conjointly removed or conjointly lifted with the filmportion in the sintering press according to the invention in the case ofthe film portion adhering to the first connection partner and/or thesecond connection partner after the pressing procedure.

In method step a) the first connection partner can be disposed directlyon the suction-fixing installation.

Alternatively, when in method step a) the first connection partner isdisposed directly on the workpiece carrier having passage ducts so as tobe above the passage ducts, the workpiece carrier can be disposeddirectly on the suction-fixing installation in such a manner that thepassage ducts are disposed so as to be in alignment with the firstsuction openings.

It is to be noted that the elements described in the singular mayoptionally also be present in multiples. For example, the firstconnection partner and/or the second connection partner may be presentin multiples such that a plurality of sintered connections between theconnection partners can be produced in one pressing procedure of thesintering press according to the invention. To this end, a plurality offirst connection partners can be disposed above the first suctionopenings. The respective first connection partner can be assigned arespective fixing region having in each case assigned first suctionopenings on the side of the suction-fixing installation that faces thecompression piece. For example, the sintering press can have a pluralityof suction grippers, wherein the respective suction gripper can firmlyhold a respective first connection partner.

The above and other aspects, features and advantages of the presentinvention will become apparent from the following description read inconjunction with the accompanying drawings, in which like referencenumerals designate the same elements.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a sectional view of a configuration of the sintering pressaccording to the invention, having first and second connection partnerswhich are disposed in the sintering press.

FIG. 2 shows a plan view of FIG. 1 of a side of a suction-fixinginstallation of the sintering press that faces a compression piece ofthe sintering press.

FIG. 3 shows a sectional view of a further configuration of a sinteringpress according to the invention, having first and second connectionpartners which are disposed in the sintering press.

FIG. 4 shows a plan view of FIG. 3 of a side of a suction-fixinginstallation of the sintering press that faces a compression piece ofthe sintering press.

FIG. 5 shows a plan view of a suction gripper of the sintering pressaccording to the invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Reference will now be made in detail to embodiments of the invention.Wherever possible, same or similar reference numerals are used in thedrawings and the description to refer to the same or like parts orsteps. The drawings are in simplified form and are not to precise scale.The word ‘couple’ and similar terms do not necessarily denote direct andimmediate connections, but also include connections through intermediateelements or devices. For purposes of convenience and clarity only,directional (up/down, etc.) or motional (forward/back, etc.) terms maybe used with respect to the drawings. These and similar directionalterms should not be construed to limit the scope in any manner. It willalso be understood that other embodiments may be utilized withoutdeparting from the scope of the present invention, and that the detaileddescription is not to be taken in a limiting sense, and that elementsmay be differently positioned, or otherwise noted as in the appendedclaims without requirements of the written description being requiredthereto.

Various operations may be described as multiple discrete operations inturn, in a manner that may be helpful in understanding embodiments ofthe present invention; however, the order of description should not beconstrued to imply that these operations are order dependent.

*A sectional view of a configuration according to the invention of asintering press 1 having first connection partners 5 and secondconnection partners 6 disposed in the sintering press 1 is illustratedin FIG. 1. A plan view of FIG. 1 of a side 3 a of a suction-fixinginstallation 3 of the sintering press 1 that faces a compression piece10 of the sintering press 1 is illustrated in FIG. 2. A sectional viewof a further configuration of a sintering press 1 according to theinvention having first connection partners 5 and second connectionpartners 6 disposed in the sintering press 1 is illustrated in FIG. 3. Aplan view of FIG. 3 of a side 3 a of a suction-fixing installation 3 ofthe sintering press 1 that faces a compression piece 10 of the sinteringpress 1 is illustrated in FIG. 4.

A sintering press 1 according to the invention for producing a sinteredconnection between a first connection partner 5 and a second connectionpartner 6 disposed thereabove is illustrated in FIG. 1 and FIG. 3. Asintering material 7 to be sintered is disposed between the firstconnection partner 5 and the second connection partner 6.

The first connection partner 5 can be configured, for example, as asubstrate, as in the exemplary embodiments. The substrate 5 has aninsulation layer 5 a which is not electrically conducting, a metallizinglayer 5 b which has been structured so as to form conductor paths 5 b′being disposed on the first main side 5 a′ of said insulation layer 5 athat faces the compression piece 10. The conductor paths 5 b′ aredisposed so as to be mutually spaced apart on the insulation layer 5 a.The insulation layer 5 a is preferably configured as a ceramic board.The substrate 5 preferably has a structured or non-structured furthermetallizing layer 5 c which is disposed on the insulation layer 5 a,wherein the insulation layer 5 a is disposed between the metallizinglayer 5 b and the further metallizing layer 5 c. The respectivemetallizing layer 5 b or 5 c, respectively, is connected to theinsulation layer 5 a in a materially-bonded manner. The substrate 5 canbe configured, for example, as a direct copper bonded substrate (DCBsubstrate) or as an active metal brazing substrate (AMB substrate).Alternatively, the substrate 5 can also be configured as an insulatedmetal substrate (IMS substrate).

The second connection partner 6, as in the exemplary embodiments, can beconfigured as a power semiconductor component, for example, wherein thepower semiconductor component 6 is preferably present in the form of apower semiconductor switch or a diode. The respective powersemiconductor switch herein is preferably present in the form of atransistor such as, for example, an IGBT (insulated gate bipolartransistor) or in the form of a MOSFET (metal oxide semiconductor fieldeffect transistor) or a thyristor. The second connection partner 6 canhowever also be configured as an electrically conducting load-connectionelement, for example.

It is to be noted that the respective connection partner 5 or 6,respectively, can also be composed of a plurality of components whichare connected to one another. For example, the first connection partner5 can thus also comprise a substrate and a power semiconductor componentwhich are already connected to one another in an electrically conductingmanner by way of a sintered metal or a solder, and the second connectionpartner 6 can be present in the form of a metallic foil. The metallicfoil is preferably structured so as to form conductor paths and is acomponent part of a film/foil composite.

The sintering press 1 furthermore has a suction-fixing installation 3for fixing the first connection partner 5, and a compression piece 10which is disposed above the suction-fixing installation 3. Thecompression piece 10 is preferably configured from metal and can beconfigured, for example, as a metal plate (see in an exemplary mannerFIG. 1 and FIG. 3) or as a die. The sintering press 1 can have anelastic pressure pad 2 which is disposed between the suction-fixinginstallation 3 and the compression piece 10 and which can be composed ofsilicone, for example. The pressure pad 2 is preferably connected to thecompression piece 10.

A film portion 4 a of a film 4, in particular of a plastic film 4 whichis preferably configured as a polytetrafluoroethylene film (PTFE film)can be disposed between the compression piece 10 and the suction-fixinginstallation 3 or, if present, between the pressure pad 2 and thesuction-fixing installation 3. The film portion 4 a can be disposedmanually on the first connection partner 5 and the second connectionpartner 6 prior to the pressing procedure carried out by the sinteringpress 1 for producing the sintered connection, for example, and afterthe pressing procedure, once the sintered connection has been produced,can again be manually lifted from the first connection partner 5 and thesecond connection partner 6 in the direction of the normal direction N1of the side 3 a of the suction-fixing installation 3 that faces thecompression piece 10. Alternatively, this procedure can also take placein an automated manner by means of a film-moving installation.

The sintering press 1 for producing the sintered connection, when thefirst connection partner 5 and the second connection partner 6 aredisposed between the compression piece 10 and the suction-fixinginstallation 3, is configured for converging the compression piece 10and the suction-fixing installation 3 relative to one another and, onaccount thereof, for mutually compressing the first connection partner 5and the second connection partner 6. The converging of the compressionpiece 10 and of the suction-fixing installation 3 relative to oneanother in the invention can take place in that the compression piece 10moves downward and/or in that the suction-fixing installation 3 movesupward, as is illustrated by the arrows 8 in FIG. 1 and FIG. 3.

The suction-fixing installation 3 on the side 3 a thereof that faces thecompression piece 10 has first suction openings 9, wherein thesuction-fixing installation 3, when the first connection partner 5 isdisposed above the first suction openings 9, by means of generating anegative pressure at the first suction openings 9, is configured forsuctioning the first connection partner 5 and, on account thereof, forfixing the latter in relation to the suction-fixing installation 3. Thefirst connection partner 5, as is illustrated in an exemplary manner inFIG. 1 and FIG. 3, covers the first suction openings 9. The firstconnection partner 5 is disposed in the region of the first suctionopenings 9. On account of the first connection partner 5 by means of thesuction-fixing installation 3 being fixed in relation to thesuction-fixing installation 3, a movement of the first connectionpartner 5, in particular in the normal direction N1 of the side 3 a ofthe suction-fixing installation 3 that faces the compression piece 10,in relation to the suction-fixing installation 3 is prevented. When thefirst connection partner 5 and/or the second connection partner 6 afterthe impingement with pressure by the sintering press 1 adhere(s) to thecompression piece 10 or, if present, to the pressure pad 2, or when thefirst connection partner 5 and/or the second connection partner 6adhere(s) to the plastic film portion 4 a if a plastic film portion 4 aof a plastic film 4 is disposed between the pressure pad 2 and theconnection partners 5 and 6 during the impingement with pressure, thefirst connection partner 5 and thus also the second connection partner 6remain fixed in relation to the suction-fixing installation 3 when thecompression piece 10, or the elastic pressure pad 2, or the plastic film4, respectively, is lifted after the impingement with pressure, or afterproducing the sintered connection, respectively, such that saidconnection partners 5, 6 are not lifted conjointly with the compressionpiece 10, or with the pressure pad 2, or with the plastic film 4,respectively.

The suction-fixing installation 3, as is illustrated in an exemplarymanner in FIG. 1 and FIG. 3, can be disposed on a compressioncounterpart 11 of the sintering press 1 and preferably be connected tosaid compression counterpart 11 by means of a force-fitting and/orform-fitting connection, for example, in particular by means of a screwconnection, or be an integral component part of a compressioncounterpart 11 of the sintering press 1. The compression counterpart 11is preferably configured from metal. The suction-fixing installation 3and/or the compression counterpart 11 and/or the compression piece 10preferably have a heat generation installation which is not illustratedin the figures and by means of which the first connection partner 5and/or the second connection partner 6 and thus the sintering material 7to be sintered can be heated for producing the sintered connection.

The respective cross-sectional area of the first suction openings 9 ispreferably 0.007 mm2 to 3.2 mm2, in particular 0.03 mm2 to 1.8 mm2. Thecross-sectional area of the first suction openings 9 is thus preferablyrelatively small. Damage to the first connection partner 5, and inparticular breaking of the first connection partner 5, is reliablyavoided on account thereof when a high pressure acts on the firstconnection partner 5, such as on a substrate, for example, during thepressing procedure, despite said first connection partner 5 not bearingacross the full area, the latter being caused by the first suctionopenings 9. The first suction openings 9 preferably have a circularshape.

As is illustrated in an exemplary manner in FIG. 2 and FIG. 4, the side3 a of the suction-fixing installation 3 that faces the compressionpiece 10 preferably has a preferably rectangular fixing region 14,wherein the first suction openings 9 are disposed within the fixingregion 14, wherein at least some 9′ of the first suction openings 9 aredisposed in a peripheral region 14 c of the fixing region 14, or aredisposed in a central region of the fixing region 14 (not illustrated inthe figures). All first suction openings 9 can also be disposed in theperipheral region 14 c of the fixing region 14, or be disposed in thecentral region of the fixing region 14. At least some of the firstsuction openings 9 can be disposed along at least one lateral periphery14 a of the fixing region 14. All first suction openings 9 can also bedisposed along at least one lateral periphery 14 a of the fixing region14. The shape of the fixing region 14 is preferably adapted to theperimeter shape of the side 5 d of the first connection partner 5 thatfaces the suction-fixing installation 3. In the case of a rectangularfixing region 14, the number of first suction openings 9 preferably incorner regions 14 b of the fixing region 14 is increased in comparisonto other regions of the fixing region 14.

In the exemplary embodiment according to FIG. 1 and FIG. 2, the firstconnection partner 5 is disposed directly on the suction-fixinginstallation 3, more specifically directly on the side 3 a of thesuction-fixing installation 3 that faces the compression piece 10, so asto be above the first suction openings 9. The first connection partner 5mechanically contacts the suction-fixing installation 3, morespecifically the side 3 a of the suction-fixing installation 3 thatfaces the compression piece 10. The suction-fixing installation 3, whenthe first connection partner 5 is disposed directly on thesuction-fixing installation 3 so as to be above the first suctionopenings 9, by means of generating a negative pressure at the firstsuction openings 9, is configured for suctioning the first connectionpartner 5 and, on account thereof, for fixing the latter in relation tothe suction-fixing installation 3. The first connection partner 5 in theexemplary embodiment according to FIG. 1 and FIG. 2 is thus fixeddirectly on the suction-fixing installation 3 by the suction-fixinginstallation 3.

In the exemplary embodiment according to FIG. 1 and FIG. 2, thesuction-fixing installation 3 on the side 3 a thereof that faces thecompression piece 10 preferably has at least one second suction opening15 for suctioning the film portion 4 a of the film 4 when the filmportion 4 a is disposed above the first connection partner 5 and thesecond connection partner 6 and above the at least one second suctionopening 15. The at least one second suction opening 15 is disposed insuch a manner that the first connection partner 5, when the firstconnection partner 5 is disposed above the first suction openings 9, isnot disposed above the at least one second suction opening 15. Thesuction-fixing installation 3, when the film portion 4 a is disposedabove the at least one second suction opening 15, by means of generatinga negative pressure at the at least one second suction opening 15, isconfigured for suctioning the film portion 4 a and, on account thereof,for fixing the first connection partner 5 in relation to thesuction-fixing installation 3 by way of the film portion 4 a. On accountthereof, the first connection partner 5 in relation to thesuction-fixing installation 3 is additionally fixed indirectly by way ofthe film portion 4 a. The suction-fixing installation 3, as isillustrated in an exemplary manner in FIG. 2, can have a plurality ofsecond suction openings 15 which in a projected view toward the firstconnection partner 5 are preferably disposed so as to encircle the firstconnection partner 5. The at least one second suction opening 15 mayalso be configured in the shape of a slot.

Preferably elastic delimitation elements 13 can be disposed on the side3 a of the suction-fixing installation 3 that faces the compressionpiece 10, said delimitation elements 13, when the first connectionpartner 5 is disposed directly on the suction-fixing installation 3,delimiting or preventing a movement of the first connection partner 5 inthe direction perpendicular to the normal direction N1 of the side 3 aof the suction-fixing installation 3 that faces the compression piece10, thus in addition to the suction-fixing installation 3 fixing thefirst connection partner 5, albeit only in the direction perpendicularto the normal direction N1 of the side 3 a of the suction-fixinginstallation 3 that faces the compression piece 10. The suction-fixinginstallation 3 in relation to the suction-fixing installation 3 fixesthe first connection partner 5 in the direction perpendicular to thenormal direction N1 of the side 3 a of the suction-fixing installation 3that faces the compression piece 10 and in the direction of the normaldirection N1 of the side 3 a of the suction-fixing installation 3 thatfaces the compression piece 10. The delimitation elements 13 preferablyalso serve as positioning aids for positioning the first connectionpartner 5 above the first suction openings 9. The delimitation elements13 can be configured from silicone, for example.

As opposed to the configuration of the invention according to FIG. 1 andFIG. 2, a workpiece carrier 17 is disposed between the suction-fixinginstallation 3 and the second connection partner 6 in the configurationof the invention according to FIG. 3 and FIG. 4. The workpiece carrier17 has passage ducts 16 running therethrough. The first connectionpartner 5 is disposed directly on the workpiece carrier 17 so as to beabove the passage ducts 16. The first connection partner 5 thusmechanically contacts the workpiece carrier 17. The workpiece carrier 17is disposed directly on the suction-fixing installation 3, morespecifically on the side 3 a of the suction-fixing installation 3 thatfaces the compression piece 10, so as to be above the first suctionopenings 9. The workpiece carrier 17 thus mechanically contacts thesuction-fixing installation 3, more specifically the side 3 a of thesuction-fixing installation 3 that faces the compression piece 10. Thesuction-fixing installation 3, when the first connection partner 5 isdisposed directly on the workpiece carrier 17 so as to be above thepassage ducts 16 and the workpiece carrier 17 is disposed directly onthe suction-fixing installation 3 in such a manner that the passageducts 16 are disposed so as to be in alignment with the first suctionopenings 9, by means of generating a negative pressure at the firstsuction openings 9, is configured for suctioning the first connectionpartner 5 and, on account thereof, fixing the latter in relation to thesuction-fixing installation 3.

The negative pressure generated at the first suction openings 9 has theeffect that a negative pressure is generated in the passage ducts 16such that the first connection partner 5 is suctioned through theworkpiece carrier 17 by the suction-fixing installation 3 and is thusfixed in relation to the suction-fixing installation 3. The gas pressureprevailing in the press chamber 28 of the sintering press 1 above thefirst connection partner 5 pushes the first connection partner 5 againstthe workpiece carrier 17, and the workpiece carrier 17 against thesuction-fixing installation 3. The gas pressure is preferably present inthe form of the air pressure. The pressing procedure of the sinteringpress 1 for producing a sintered connection takes place in the presschamber 28. The workpiece carrier 17 preferably serves for transportingthe first connection partner 5 conjointly with the second connectionpartner 6 disposed thereabove and with the sintering material 7 which isto be sintered and is disposed between the connection partners 5 and 6into the sintering press 1 and out of the sintering press 1 once thesintered connection has been produced, wherein the sintering material 7on account of being impinged with pressure and temperature in thesintering press 1 is converted to a sintered metal.

The sintering material 7 to be sintered is preferably present in theform of a sintering paste common in this technology. The sinteringmaterial 7, in particular the sintering paste, contains metal particles,for example of silver. The workpiece carrier 17 can be present, forexample, in the form of a metal plate having passage ducts. Theworkpiece carrier 17 on the side thereof that faces the first connectionpartner 5 can have a depression in which a lower part of the firstconnection partner 5 is disposed for positioning the first connectionpartner 5, for example, this not being illustrated in FIG. 3 and FIG. 4.A frame element 29 which encircles the first connection partner 5 and ismovable in relation to the workpiece carrier 17 at least in the normaldirection N1 of the side 3 a of the suction-fixing installation 3 thatfaces the compression piece 10 can be disposed on the workpiece carrier17. The frame element 29 on the side thereof that faces thesuction-fixing installation 3 has ventilation trenches 29 a which in thedirection perpendicular to the normal direction N1 of the side 3 a ofthe suction-fixing installation 3 that faces the compression piece 10run through the frame element 29.

The region which encircles the periphery of the first connection partner5 below the film 4 a is ventilated by the ventilation trenches 29 a,this facilitating the lifting of the film 4 a. It is furthermorepreferably avoided on account of the frame element 29 that the film 4 aadheres to the workpiece carrier 17. The same applies in an analogousmanner to the pressure pad 2, if the pressure pad 2 is present and thefilm 4 a is absent. It is to be noted that the frame element 29 can bedisposed in a manner identical to that described above so as to beconfigured on the suction-fixing installation 3 also in the exemplaryembodiment according to FIG. 1 and FIG. 2. Preferably elasticdelimitation elements (not illustrated in FIG. 3 and FIG. 4) candisposed on the workpiece carrier 17, said delimitation elementsdelimiting or preventing a movement of the first connection partner 5 inthe direction perpendicular to the normal direction N1 of the side 3 aof the suction-fixing installation 3 that faces the compression piece10. These delimitation elements preferably also serve as positioningaids for positioning the first connection partner 5 on the workpiececarrier 17. The delimitation elements can be configured from silicone,for example.

In the exemplary embodiment according to FIG. 3 and FIG. 4, thesuction-fixing installation 3 on the side 3 a thereof that faces thecompression piece 10 has at least one second suction opening 15′ forfixing the workpiece carrier 17 when the latter is disposed directly onthe suction-fixing installation 3. The suction-fixing installation 3,when the workpiece carrier 17 is disposed above the at least one secondsuction opening 15′, by means of generating a negative pressure at theat least one second suction opening 15′, is configured for suctioningthe workpiece carrier 17 and, on account thereof, for fixing the latterin relation to the suction-fixing installation 3. On account thereof,the workpiece carrier 17 is yet again additionally fixed to thesuction-fixing installation 3. The suction-fixing installation 3, as isillustrated in an exemplary manner in FIG. 4, can have a plurality ofsecond suction openings 15′ which in a projected view toward the firstconnection partner 5 are preferably disposed so as to encircle the firstconnection partner 5. The at least one second suction opening 15′ mayalso be configured in the shape of a slot.

Even though not illustrated in FIG. 3 and FIG. 4, it is neverthelessfurthermore to be noted that the suction-fixing installation 3 may alsohave at least one third suction opening which is not disposed above thefirst connection partner 5, and the workpiece carrier 17 may have atleast one further passage duct, wherein the at least one further passageduct is disposed so as to be aligned above the at least one thirdsuction opening. The suction-fixing installation 3, when the filmportion 4 a is disposed above the at least one further passage duct, bymeans of generating a negative pressure at the at least one thirdsuction opening, is configured for suctioning the film portion 4 a and,on account thereof, for fixing the first connection partner 5 inrelation to the suction-fixing installation 3 by way of the film portion4 a. On account thereof, the first connection partner 5 is additionallyfixed indirectly in relation to the suction-fixing installation 3 by wayof the film portion 4 a. The suction-fixing installation 3 can have aplurality of third suction openings which in a projected view toward thefirst connection partner 5 are preferably disposed so as to encircle thefirst connection partner 5. The at least one third suction opening mayalso be configured in the shape of a slot.

With the exception of the differences described above, the configurationof the invention according to FIG. 3 and FIG. 4 is identical to theconfiguration of the invention according to FIG. 1 and FIG. 2, includingadvantageous configurations and variants of configurations.

The respective suction openings 9, 15, 15′ of the suction-fixinginstallation 3 are fluidically connected to a respectivenegative-pressure connector 26 or 27, respectively, by way of arespective negative-pressure line duct system 20 or 21, respectively. Asuctioning installation which by way of the respective negative-pressureline duct system 20 or 21, respectively, generates a respective negativepressure at the respective suction openings 9, 15, 15′ of thesuction-fixing installation 3 such that, when the first connectionpartner 5 is disposed above the first suction openings 9, the firstconnection partner 5 is suctioned by the first suction openings 9, orwhen the film portion 4 a is disposed above the at least one secondsuction opening 15 or 15′, respectively, the film portion 4 a issuctioned by the at least one second suction opening 15 or 15′,respectively, is connected to the negative-pressure connectors 26 or 27,respectively, said suctioning installation not being illustrated forreasons of clarity in any figures. The negative pressure generated bythe suctioning installation in the negative-pressure line duct system 20or 21, respectively, is preferably controllable in an independent mannersuch that the negative pressure at the first suction openings 9 and atthe at least one second suction opening 15 or 15′, respectively, is ineach case controllable in an independent manner. The same applies inanalogous manner should the suction-fixing installation 3 have at leastone third suction opening.

The sintering press 1 preferably has a suction gripper 22 which by meansof generating a negative pressure at the suction openings 24 thereof isconfigured for firmly holding the first connection partner 5 directly onsaid suction gripper 22 and, prior to the pressing procedure, fordisposing the first connection partner 5 conjointly with the secondconnection partner 6 disposed above the first connection partner 5 inthe space between the compression piece 10 and the suction-fixinginstallation 3 and/or, after the pressing procedure, for removing saidfirst connection partner 5 conjointly with said second connectionpartner 6 from said space again. In the case of the configuration of theinvention according to FIG. 1 and FIG. 2, for example, the suctiongripper, by means of generating a negative pressure on the suctionopenings 24 thereof, can thus directly firmly hold the connectionpartner 5, that is to say here the substrate 5. Alternatively, thesintering press 1 preferably has a suction gripper 22 which, by means ofgenerating a negative pressure at the suction openings 24 thereof, isconfigured for firmly holding the first connection partner 5 indirectlyon said suction gripper 22 and, prior to the pressing procedure, fordisposing the first connection partner 5 conjointly with the secondconnection partner 6 disposed above the first connection partner 5 inthe space between the compression piece 10 and the suction-fixinginstallation 3 and/or, after the pressing procedure, for removing saidfirst connection partner 5 conjointly with said second connectionpartner 6 from said space again. In the case of the configuration of theinvention according to FIG. 3 and FIG. 4, for example, the suctiongripper 22, by means of generating a negative pressure at the suctionopenings 24 thereof, can thus indirectly firmly hold the connectionpartner 5, that is to say here the substrate 5, in that said suctiongripper 22 suctions the workpiece carrier 17 on which the firstconnection partner 5 conjointly with the second connection partner 6disposed above the first connection partner 5 is disposed and, onaccount thereof, indirectly firmly holds the first connection partner 5on said suction gripper 22. The workpiece carrier 17, conjointly withthe first connection partner 5 and the second connection partner 6disposed above the first connection partner 5, can be disposed by thesuction gripper 22 in the space between the compression piece 10 and thesuction-fixing installation 3 prior to the pressing procedure and/or canagain be removed from said space after the pressing procedure. Thesuction gripper 22 preferably has sealing lips 25 which are in each casedisposed so as to encircle one suction opening 24. The suction gripper22 furthermore preferably has a frame 23 on which the sealing lips 25and the suction openings 24 are disposed.

A pressure sintering method according to the invention for producing asintered connection between the first connection partner 5 and thesecond connection partner 6 disposed thereabove by means of thesintering press 1 according to the invention will be describedhereunder.

In a method step a), disposing between the compression piece 10 and thesuction-fixing installation 3 the first connection partner 5 conjointlywith the second connection partner 6 disposed above the first connectionpartner 5 takes place, wherein the sintering material 7 to be sinteredis disposed between the first connection partner 5 and the secondconnection partner 6, wherein the first connection partner 5 is disposedabove the first suction openings 9. The first connection partner 5herein can be disposed directly on the suction-fixing installation 3, asis illustrated in an exemplary manner in FIG. 1 and FIG. 2.Alternatively, the first connection partner 5 herein can be disposeddirectly on the workpiece carrier 17 having passage ducts 16 so as to beabove the passage ducts 16, and the workpiece carrier 17 can be disposeddirectly on the suction-fixing installation 3 in such a manner that thepassage ducts 16 are disposed so as to be in alignment with the firstsuction openings 9, as is illustrated in an exemplary manner in FIG. 3and FIG. 4. The disposing of the first connection partner 5 conjointlywith the second connection partner 6 disposed above the first connectionpartner 5 herein can in each case take place by means of the suctiongripper 22, as described above.

In a subsequent method step b), fixing the first connection partner 5 inrelation to the suction-fixing installation 3 by suctioning the firstconnection partner 5 by means of generating a negative pressure at thefirst suction openings 9 takes place.

In a subsequent method step c), impinging the first connection partner 5and the second connection partner 6 and the sintering material 7 withpressure takes place by converging the compression piece 10 and thesuction-fixing installation 3 relative to one another, wherein, onaccount thereof, the first connection partner 5 and the secondconnection partner 6 are mutually compressed, and impinging thesintering material 7 with a temperature takes place, wherein thesintering material 7 on account of the impingement with pressure andtemperature is converted to a sintered metal. The conversion of thesintering material 7 to the sintered metal takes place by sintering themetal particles contained in the sintering material 7. The metalparticles in the exemplary embodiments are composed of silver such thatthe sintered metal in the exemplary embodiments is composed of silver.The impingement of the sintering material 7 with a temperaturepreferably takes place by heating the compression counterpart 11 and/orthe suction-fixing installation 3 and/or the compression piece 10. Theheat herein is transmitted from the first connection partner 5 and/orfrom the second connection partner 6 to the sintering material 7. Theconverging of the compression piece 10 and the suction-fixinginstallation 3 relative to one another in the invention can take placein that the compression piece 10 is moved downward and/or in that thesuction-fixing installation 3 is moved upward, as is illustrated by thearrows 8 in FIG. 1 and FIG. 3. The suction-fixing installation 3 canmove upward, for example, in that the compression counterpart 11 in FIG.1 and FIG. 3 moves upward.

In a subsequent method step d), diverging the compression piece 10 andthe suction-fixing installation 3 relative to one another takes place.The diverging of the compression piece 10 and the suction-fixinginstallation 3 relative to one another in the invention can take placein that the compression piece 10 in FIG. 1 and FIG. 3 moves upward,and/or in that the suction-fixing installation 3 moves downward. Thesuction-fixing installation 3 can move downward, for example, in thatthe compression counterpart 11 in FIG. 1 and FIG. 3 moves downward.

In a subsequent method step e), releasing the first connection partner 5in relation to the suction-fixing installation 3 takes place byreinstating the gas pressure prevailing in the press chamber 28 of thesintering press 1 above the first connection partner 5 at the firstsuction openings 9. The gas pressure is preferably present in the formof the air pressure. Subsequently, the first connection partner 5conjointly with the second connection partner 6 which is disposed abovethe first connection partner 5 and is connected to the latter by meansof the sintered bond is removed from the press chamber 28 again,preferably by means of the suction gripper 22.

The film portion 4 a of the film 4 is preferably disposed on the firstconnection partner 5 and the second connection partner 6 between methodsteps a) and b) or between method steps b) and c). This can take placemanually or by means of a film-moving installation which disposes thefilm portion 4 a on the first connection partner 5 and the secondconnection partner 6. Once the film portion 4 a has been disposed on thefirst connection partner 5 and the second connection partner 6, saidfilm portion 4 a can be suctioned by way of the at least one secondsuction opening 15 or 15′, respectively, which is preferably present, ashas already been described above.

Between method steps d) and e), the film portion 4 a can be removed fromthe first connection partner 5 and the second connection partner 6, forexample in that the film portion 4 a is lifted manually again from thefirst connection partner 5 and the second connection partner 6 in thedirection of the normal direction N1 of the side 3 a of thesuction-fixing installation 3 that faces the compression piece 10.Alternatively, the lifting of the film portion 4 a away from the firstconnection partner 5 and the second connection partner 6 in thedirection of the normal direction N1 of the side 3 a of thesuction-fixing installation 3 that faces the compression piece 10 canalso take place in an automated manner by means of a film-movinginstallation.

It is to be noted that of course features of different exemplaryembodiments of the invention can be combined with one another in anarbitrary manner, unless the features are mutually exclusive, withoutdeparting from the scope of the invention.

Also, the inventors intend that only those claims which use the specificand exact phrase “means for” are intended to be interpreted under 35 USC112, sixth paragraph. The structure herein is noted and well supportedin the entire disclosure. Moreover, no limitations from thespecification are intended to be read into any claims, unless thoselimitations are expressly included in the claims.

Having described at least one of the preferred embodiments of thepresent invention with reference to the accompanying drawings, it willbe apparent to those skills that the invention is not limited to thoseprecise embodiments, and that various modifications and variations canbe made in the presently disclosed system without departing from thescope or spirit of the invention. Thus, it is intended that the presentdisclosure cover modifications and variations of this disclosureprovided they come within the scope of the appended claims and theirequivalents.

What is claimed is:
 1. A sintering press for producing a sinteredconnection between a first connection partner (5) and a secondconnection partner (6) disposed thereabove, having a suction-fixinginstallation (3) for fixing the first connection partner (5), having acompression piece (10) which is disposed above the suction-fixinginstallation (3), wherein: said sintering press (1) for producing thesintered connection, when the first connection partner (5) and thesecond connection partner (6) are disposed between the compression piece(10) and the suction-fixing installation (3), is configured forconverging the compression piece (10) and the suction-fixinginstallation (3) relative to one another and, on account thereof, formutually compressing the first connection partner (5) and the secondconnection partner (6); the suction-fixing installation (3) on the side(3 a) thereof that faces the compression piece (10) has first suctionopenings (9); the suction-fixing installation (3), when the firstconnection partner (5) is disposed above the first suction openings (9),by means of generating a negative pressure at the first suction openings(9), is configured for suctioning the first connection partner (5) and,on account thereof, for fixing the latter in relation to thesuction-fixing installation (3).
 2. The sintering press according toclaim 1, wherein: the suction-fixing installation (3) is disposed on acompression counterpart (11) of the sintering press (1), or is anintegral component part of a compression counterpart (11) of thesintering press (1).
 3. The sintering press according to claim 1,wherein: the respective cross-sectional area of the first suctionopenings (9) is 0.007 mm2 to 3.2 mm², in particular 0.03 mm² to 1.8 mm2.4. The sintering press according to claim 3, wherein: the side (3 a) ofthe suction-fixing installation (3) that faces the compression piece(10) has an in particular rectangular fixing region (14); and whereinthe first suction openings (9) are disposed within the fixing region(14), wherein at least some (9′) of the first suction openings (9) aredisposed in a peripheral region (14 c) of the fixing region (14) or aredisposed in a central region of the fixing region (14).
 5. The sinteringpress according to claim 4, wherein: the side (3 a) of thesuction-fixing installation (3) that faces the compression piece (10)has a rectangular fixing region (14); and wherein the number of firstsuction openings (9) in the corner regions (14 b) of the fixing region(14) is increased in comparison to other regions of the fixing region(14).
 6. The sintering press according to claim 5, wherein: thesintering press (1) has a suction gripper (22) which, by means ofgenerating a negative pressure at the suction openings (24) thereof, isconfigured for (i) thinly holding the first connection partner (5)directly or indirectly on said suction gripper (22) and, prior to thepressing procedure, for disposing the first connection partner (5)conjointly with the second connection partner (6) disposed above thefirst connection partner (5) in the space between the compression piece(10) and the suction-fixing installation (3) and after the pressingprocedure, for (ii) removing said first connection partner (5)conjointly with said second connection partner (6) from said spaceagain.
 7. The sintering press according to claim 6, wherein: thesintering press (1) for producing the sintered connection, when thefirst connection partner (5) and the second connection partner (6) aredisposed between the compression piece (10) and the suction-fixinginstallation (3) and the first connection partner (5) is disposeddirectly on the suction-fixing installation (3), and is configured forconverging the compression piece (10) and the suction-fixinginstallation (3) relative to one another and, on account thereof, formutually compressing the first connection partner (5) and the secondconnection partner (6); wherein the suction-fixing installation (3) onthe side (3 a) thereof that faces the compression piece (10) has firstsuction openings (9); and wherein the suction-fixing installation (3),when the first connection partner (5) is disposed above the firstsuction openings (9) so as to be directly on the suction-fixinginstallation (3), by means of generating a negative pressure at thefirst suction openings (9), is configured for suctioning the firstconnection partner (5) and, on account thereof, for fixing the latter inrelation to the suction-fixing installation (3).
 8. The sintering pressaccording to claim 7, wherein: the suction-fixing installation (3) onthe side (3 a) thereof that faces the compression piece (10) has atleast one second suction opening (15) for suctioning a film portion (4a) of a film (4) when the film portion (4 a) is disposed above the firstconnection partner (5) and the second connection partner (6) and abovethe at least one second suction opening (15); wherein the at least onesecond suction opening (15) is disposed in such a manner that the firstconnection partner (5), when the first connection partner (5) isdisposed above the first suction openings (9), is not disposed above theat least one second suction opening (15); and wherein the suction-fixinginstallation (3), when the film portion (4a) is disposed above the atleast one second suction opening (15), by means of generating a negativepressure at the at least one second suction opening (15), is configuredfor suctioning the film portion (4 a) and, on account thereof, forfixing the first connection partner (5) in relation to thesuction-fixing installation (3) by way of the film portion (4 a).
 9. Thesintering press according to claim 8, wherein: a plurality of elasticdelimitation elements (13) are disposed on the side (3 a) of thesuction-fixing installation (3) that faces the compression piece (10);said delimitation elements (13), when the first connection partner (5)is disposed directly on the suction-fixing installation (3), delimit orprevent a movement of the first connection partner (5) in a directionperpendicular to the normal direction (N1) of the side (3 a) of thesuction-fixing installation (3) that faces the compression piece (10).10. The sintering press according to claim 6, wherein: when the firstconnection partner (5) and the second connection partner (6) aredisposed between the compression piece (10) and the suction-fixinginstallation (3) and the first connection partner (5) is disposeddirectly on a workpiece carrier (17) and has a plurality of passageopenings (16) so as to be above the passage openings (16) and theworkpiece carrier (17) is disposed directly on the suction-fixinginstallation (3), is configured for converging the compression piece(10) and the suction-fixing installation (3) relative to one another formutually compressing the first connection partner (5) and the secondconnection partner (6); wherein the suction-fixing installation (3) onthe side (3 a) thereof that faces the compression piece (10) has firstsuction openings (9); and wherein the suction-fixing installation (3),when the first connection partner (5) is disposed directly on aworkpiece carrier (17) has a plurality of passage ducts (16) so as to beabove the passage ducts (16) and the workpiece carrier (17) is disposeddirectly on the suction-fixing installation (3) in such a manner thatthe passage ducts (16) are disposed so as to be in alignment with thefirst suction openings (9), by means of generating a negative pressureat the first suction openings (9), is configured for suctioning thefirst connection partner (5) and, on account thereof, for fixing thelatter in relation to the suction-fixing installation (3).
 11. Thesintering press according to claim 10, wherein: the suction-fixinginstallation (3) on the side (3 a) thereof that faces the compressionpiece (10) has at least one second suction opening (15′) for fixing theworkpiece carrier (17) when the latter is disposed directly on thesuction-fixing installation (3); and wherein the suction-fixinginstallation (3), when the workpiece carrier (17) is disposed above theat least one second suction opening (15′), by means of generating anegative pressure at the at least one second suction opening (15′), isconfigured for suctioning the workpiece carrier (17) and, on accountthereof, for fixing the latter in relation to the suction-fixinginstallation (3).
 12. The sintering press according to claim 11,wherein: a frame element (29) encircles the first connection partner (5)and is movable in relation to the workpiece carrier (17) at least in thenormal direction (N1) of the side (3 a) of the suction-fixinginstallation (3) that faces the compression piece (10) is disposed onthe workpiece carrier (17); and wherein the frame element (29) on theside thereof that faces the suction-fixing installation (3) hasventilation trenches (29 a) which in the direction perpendicular to thenormal direction (N1) of the side (3 a) of the suction-fixinginstallation (3) that faces the compression piece (10) run through theframe element (29).
 13. A pressure sintering method for producing asintered connection between a first connection partner (5) and a secondconnection partner (6) disposed thereabove by means of a sintering press(1) which is configured according to claim 1, said method comprising thefollowing method steps in succession: a) disposing between thecompression piece (10) and the suction-fixing installation (3) the firstconnection partner (5) conjointly with the second connection partner (6)disposed above the first connection partner (5), wherein a sinteringmaterial (7) to be sintered is disposed between the first connectionpartner (5) and the second connection partner (6), wherein the firstconnection partner (5) is disposed above the first suction openings (9);b) fixing the first connection partner (5) in relation to thesuction-fixing installation (3) by suctioning the first connectionpartner (5) by means of generating a negative pressure at the firstsuction openings (9); c) impinging the first connection partner (5) andthe second connection partner (6) and the sintering material (7) with apressure by converging the compression piece (10) and the suction-fixinginstallation (3) relative to one another, wherein, on account thereof,the first connection partner (5) and the second connection partner (6)are mutually compressed, and impinging the sintering material (7) with atemperature, wherein the sintering material (7) on account of theimpingement with pressure and temperature is converted to a sinteredmetal; d) diverging the compression piece (10) and the suction-fixinginstallation (3) relative to one another; e) releasing the firstconnection partner (5) in relation to the suction-fixing installation(3) by reinstating the gas pressure prevailing above the firstconnection partner (5) at the first suction openings (9).
 14. Thepressure sintering method according to claim 13, wherein: between methodsteps a) and b), or between method steps b) and c), a film portion (4 a)of a film (4) is disposed on the first connection partner (5) and thesecond connection partner (6).
 15. The pressure sintering methodaccording to claim 14, wherein: between method steps d) and e) the filmportion (4a) is removed from the first connection partner (5) and thesecond connection partner (6).
 16. The pressure sintering methodaccording to claim 15, wherein the sintering press (1) is configuredaccording to claim 7, wherein: in method step a) the first connectionpartner (5) is disposed directly on the suction-fixing installation (3).17. The pressure sintering method according to claim 15, wherein: thesintering press (1) is configured according to claim 12; and wherein inmethod step (a) the first connection partner (5) is disposed directly onthe workpiece carrier (17) having passage ducts (16) so as to be abovethe passage ducts (16), and the workpiece carrier (17) is disposeddirectly on the suction-fixing installation (3) in such a manner thatthe passage ducts (16) are disposed so as to be in alignment with thefirst suction openings (9).